Download High Resolution Focused Ion Beams: FIB and its Applications: by Jon Orloff PDF

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By Jon Orloff

In this booklet, we have now tried to provide a reference on excessive answer targeted ion beams (FIBs) that may be beneficial for either the person and the fashion designer of FIB instrumentation. we have now incorporated a mixture of concept and purposes that appeared most dear to us.
The box of FIBs has complicated quickly because the program of the 1st box emission ion resources within the early Nineteen Seventies. the improvement of the liquid steel ion resource (LMIS) within the overdue Nineteen Sixties and early Nineteen Seventies and its software for FIBs within the overdue Seventies have ended in a strong device for examine and for undefined. there were countless numbers of papers written on many points of LMIS and FIBs, and an invaluable and informative booklet on those matters was once released in 1991 by way of Phil Prewett and Grame Mair. simply because there were such a lot of new functions and makes use of chanced on for FIBs within the final ten years we felt that it used to be time for an additional e-book at the topic.

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Extra info for High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

Example text

Fs and Fp were then compared and the procedure was continued until a satisfactory agreement over the whole LMIS could be obtained. The LMIS shape was the variable in the calculations. Although a completely self-consistent solution was not found, the results were reasonably accurate. 8. 7 shows the model and the coordinates used. In terms of these the fluid velocity components in the azimuthal (z} and radial (r) directions are given by V z = v cos and Vr = v sin where tan B = rlR dR/dz. 8 the field is supposed to be constant above the line AA', so that the ionization rate is independent of position.

They assumed a Taylor cone structure but expressed concern about the lack of experimental evidence for an end radius ofa few nm. A thermal analysis ofthe Taylor cone with heat input only from the apex where ionization takes place showed that 90% of the heat loss toward the interior of the cone takes place within a distance of lOra. If the primary PHYSICS OF LIQUID METAL ION SOURCES -35- mechanism of ion production was by field ionization, and if it was assumed that the probability of ionization was unity, then the current would be given by the product of the area of the emitting cap from which evaporation would take place by the flux of evaporated neutral atoms.

Since the calculations did not take into account any liquid flow impedance the calculated I-V curves are steeper than they might otherwise be. nIOI po1n.. ,'l'i ' . 0 )0 10 Volloqe 60 (kV) 6. 9. R. , "A theoretical model ofa liquid metal ion source" Vacuum 34 (1984) 941). K. , "Computer simulation ofliquid metal ion source optics," Appl. Phys. A30 (1983) 95]. 8. LIQUID FLOW CHARACTERISTICS IN THE LMIS A characteristic property of a LMIS is the fact that the emission is not continuous with voltage.

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