Download Laser Beam Shaping Applications by Fred M. Dickey, Scott C. Holswade, David L. Shealy PDF
By Fred M. Dickey, Scott C. Holswade, David L. Shealy
The perform of shaping the irradiance profile of laser beams is going again greater than 3 many years, and the functions of beam shaping are as various as they're quite a few. despite the fact that, until eventually Dickey and Holswade's groundbreaking and hugely well known Laser Beam Shaping: concept and strategies was once released, there has been no unmarried, designated therapy on hand at the underlying idea and simple recommendations of beam shaping. development at the foundations of this past paintings, those esteemed editors have teamed with famous professional David L. Shealy to supply the 1st in-depth account of beam shaping functions and design.
Laser Beam Shaping functions information the $64000 good points of beam shaping and exposes the subtleties of the idea and strategies which are top validated via confirmed purposes. In chapters contributed via favorite, lively leaders of their respective specialties, the e-book discusses functions in lithography, laser printing, optical facts garage, good isotope separation, adaptive mirrors, and spatially dispersive lasers. The members percentage significant insights, wisdom, and event, show the benefits of the applied sciences, and comprise wide references to the literature. The publication concludes with a precis of beam shaping idea and strategies in addition to the historical past of the field.
Providing useful services, Laser Beam Shaping functions is a really useful advisor to bettering present laser techniques, optimizing application-specific applied sciences, and advancing destiny improvement within the box.
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Reﬂections when using a low sigma or annular aperture in the relay portion of the illuminator. 23 The general layout of a ﬂy’s eye uniformizer. Segments of the input face of the lens array are imaged to the uniform plane by the lenslet and ﬁeld lens. 24 The design parameters of a single lenslet of the lens array. 30 Laser Beam Shaping Applications pﬃﬃ limitation, nor does a rod if the refractive index is greater than 2: The lenslet alone is a transform lens, as is the ﬁeld lens, meaning a single ﬁeld angle focuses to a point.
Illuminators for Microlithography 35 2. Laser Sources Though there are many lamp sources in the DUV, such as the mercury spectral line in the region of 248 nm, none have found prominence in microlithography due to the low power obtained after line narrowing or the difﬁculty of chromatically correcting the projection lens. The advantage of a lamp over an excimer is mainly cost. 43 These pulsed lasers have high gain efﬁciency in the excitation by electrical discharge over a broad volume. This large volume and relatively few passes through the cavity produce a source with relatively low spatial coherence.
The ﬂoor will tend to have uniform irradiance. Each point on the ﬂoor sees light from multiple sources and multiple angles, overlapping, summing, and thus averaging on the ﬂoor. Uniformizers are thus also referred to as integrators. , spotlights) or when sources with a common angular proﬁle are aimed to the center of the ﬂoor and sum to produce only that common proﬁle at the ﬂoor. Yet, these limitations are also an analogy to poor design and use of uniformizers. In the following, we discuss the creation of a ﬁeld of multiple sources with the use of kaleidoscopes, ﬂy’s eyes, and other devices to produce a uniform plane.